65040-PACV-AYU2/9049 摆阀控制系统系列65

该板作为节流元件，改变阀门开度的电导。压力控制器计算所需的板位置以达到设定值压力。另见第280页的原理图。驱动由步进电机执行。编码器监视位置。这一原理确保了快速和准确的过程压力控制。
为了不泄漏关闭，密封环被弹簧向下压紧。为了打开密封圈，密封圈是气动提升的。

Bodymaterial:
铝或
铝，硬阳极氧化
紧凑的设计
快速，几乎无颗粒和无冲击操作
集成或外部压力控制器
极短的控制响应时间
位置指示
连接计算机的业务端口
或者一个服务台
简单的维护

致动器
-执行器在b2侧(直径1)
-控制器与可配置的PID参数
(自适应、上游、下游、软泵)
– RS232接口，2个模拟输出
阀
-其他尺寸，例如dn80
-其他法兰，如ASA-LP
-客户指定法兰;
例如，用于直接安装到腔室的矩形法兰
-表面处理，如镀镍
-其他密封材料
-体内的KF端口
-带绝缘的加热器(图2)，适用于温度高达120°C的阀门
(根据要求阀门温度可达200°C)
-带分离压力控制器的阀门(图3)
-仅用于压力控制的阀门(无密封关闭)
-楔形板，用于较小的可控电导
– dn320: 16ls -1(标准22ls -1)
– dn350: 19 ls-1(标准25 ls-1)
– dn400: 22ls -1(标准30ls -1)
选项
选项订购信息:
订购。阀门-X(例如65046-PAGH-X, X =带加热器120°C的阀门)

65040-PACV-AYU2

The plate acts as a throttling element and varies the conductance of the valve opening. The pressure controller calculates the required plate position to achieve the setpoint pressure. See also principle drawing on page 280. Actuation is performed by a stepper motor. An encoder monitors the position. This principle ensures fast and accurate process pressure control.
For leaktight closing the sealing ring is pressed downwards by a spring. For opening the sealing ring is lifted pneumatically.

Bodymaterial:
aluminum or
aluminum, hard anodized
Compact design
Fast, virtually particle-free and shockfree operation
Integrated or external pressure controller
Extremely short control response times
Position indication
Service port for connecting a computer
or a service box 2
Easy maintenance

Actuator
– Actuator on B2-side (Dia. 1)
– Controller with configurable PID parameters
(adaptive, upstream, downstream, soft-pump)
– RS232 interface with 2 analog outputs
Valve
– Other sizes, e.g. DN 80
– Other flanges, e.g. ASA-LP
– Customer specified flanges,
e.g. rectangular flange for direct mounting to chamber
– Surface treatment, e.g. nickel-plated
– Other sealing materials
– KF ports in body
– Heater with insulation (Pic. 2) for valve temperatures up to 120 °C
(for valve temperatures up to 200 °C on request)
– Valve with detached pressure controller (Pic. 3)
– Valve for pressure control only (no leaktight closing)
– Wedge-shaped plate for smaller controllable conductances
– DN 320: 16 ls-1 (standard 22 ls-1)
– DN 350: 19 ls-1 (standard 25 ls-1)
– DN 400: 22 ls-1 (standard 30 ls-1)
Options
Ordering information for options:
Ordering No. of valve-X (e. g. 65046-PAGH-X, X = valve with heater for 120 °C)