AMAT 0010-23716：高精度气体分配组件/厦门雄霸现货供应

应用材料（AMAT）的0010-23716是一款专为半导体制造设备设计的高精度气体分配组件，属于 Endura 系列工艺模块的核心部件。作为晶圆处理系统中的关键元件，0010-23716主要用于精确控制反应气体的流量与分布，确保刻蚀、沉积等工艺的稳定性和一致性。该组件采用模块化设计，可无缝集成于应用材料的 Centura、Endura 等主流平台，支持 300mm 晶圆的大规模量产需求。

0010-23716的核心功能包括气体混合、压力调节和流量分配。其内部结构采用耐腐蚀材料（如石英和不锈钢），可承受高温、高压及强腐蚀性气体环境，适用于等离子体刻蚀、物理气相沉积（PVD）等复杂工艺。组件配备高精度传感器和闭环控制系统，可实时监测气体参数并自动调整，确保工艺偏差控制在 ±1% 以内。此外，该组件支持快速更换设计，显著降低设备停机时间，提升生产效率。

The Applied Materials (AMAT) 0010-23716 is a high-precision gas distribution component designed for semiconductor manufacturing equipment, serving as a core part of the Endura series process modules. As a critical element in wafer processing systems, the 0010-23716 is primarily used to precisely control the flow and distribution of reactive gases, ensuring the stability and consistency of processes such as etching and deposition. With a modular design, this component can be seamlessly integrated into Applied Materials’ mainstream platforms like Centura and Endura, supporting high-volume production of 300mm wafers.

The core functions of the 0010-23716 include gas mixing, pressure regulation, and flow distribution. Its internal structure is constructed from corrosion-resistant materials (e.g., quartz and stainless steel), capable of withstanding high temperatures, high pressures, and corrosive gas environments, making it suitable for complex processes such as plasma etching and physical vapor deposition (PVD). Equipped with high-precision sensors and a closed-loop control system, the component can monitor gas parameters in real time and adjust automatically, ensuring process deviations are controlled within ±1%. Additionally, the component supports a quick-change design, significantly reducing equipment downtime and enhancing production efficiency.Whatsapp:+86 18059884797

高精度工艺控制：0010-23716采用多通道气体混合技术，结合高精度质量流量控制器（MFC），可实现气体比例调节精度达 ±0.5%，确保薄膜沉积的均匀性和刻蚀的一致性。其内置的压力传感器实时反馈数据，支持动态调整，有效减少批次间差异。
耐腐蚀性设计：组件内部关键部件（如气体通道、阀门）采用石英和特种不锈钢材料，表面经过钝化处理，可抵御 Cl₂、SF₆等强腐蚀性气体的长期侵蚀，延长使用寿命至 5000 小时以上。
快速维护能力：模块化设计允许在 30 分钟内完成组件更换，无需整体拆卸工艺腔室。配套的智能诊断系统通过 LED 指示灯和远程接口实时监控工作状态，提前预警潜在故障，降低维护成本。
宽范围适用性：支持多种气体类型（如 O₂、N₂、Ar、CF₄）和工艺模式（如刻蚀、沉积、退火），可通过软件配置灵活适配不同制程需求，减少设备硬件更换频率。

High-precision process control: The 0010-23716 employs multi-channel gas mixing technology combined with high-precision mass flow controllers (MFCs), achieving gas ratio adjustment accuracy of ±0.5% to ensure film deposition uniformity and etching consistency. Its built-in pressure sensors provide real-time feedback for dynamic adjustments, effectively reducing inter-batch variations.
Corrosion-resistant design: Critical internal components (e.g., gas channels, valves) are constructed from quartz and specialized stainless steel, with passivated surfaces to resist long-term erosion by highly corrosive gases like Cl₂ and SF₆, extending service life to over 5,000 hours.Whatsapp:+86 18059884797
Rapid maintenance capability: The modular design allows component replacement within 30 minutes without disassembling the entire process chamber. The 配套的智能诊断系统通过 LED indicators and remote interfaces monitors operating status in real time, providing early warnings of potential faults and reducing maintenance costs.
Wide-range adaptability: Supports various gas types (e.g., O₂, N₂, Ar, CF₄) and process modes (e.g., etching, deposition, annealing), enabling flexible adaptation to different process requirements through software configuration and reducing equipment hardware replacement frequency.

半导体制造：0010-23716广泛应用于逻辑芯片、存储芯片的量产线，在刻蚀环节中精确控制气体流量，确保高深宽比结构的一致性；在 PVD/CVD 工艺中实现薄膜厚度均匀性达 99.5% 以上。
先进封装：用于 3D IC 堆叠和 TSV（硅通孔）工艺，支持纳米级精度的气体分配，满足高密度互连和微通道散热的需求。
化合物半导体：适配 GaAs、SiC 等材料的外延生长工艺，通过精准气体配比控制晶体结构质量，提升器件性能。
研发与小批量生产：兼容实验室规模的工艺开发，可通过软件快速切换参数，支持新材料、新工艺的验证测试。

Semiconductor manufacturing: The 0010-23716 is widely used in mass production lines for logic and memory chips, precisely controlling gas flow during etching to ensure uniformity of high aspect ratio structures, and achieving film thickness uniformity of over 99.5% in PVD/CVD processes.
Advanced packaging: Used in 3D IC stacking and TSV (through-silicon via) processes, supporting nanoscale precision gas distribution to meet the requirements of high-density interconnects and micro-channel heat dissipation.Whatsapp:+86 18059884797
Compound semiconductors: Compatible with epitaxial growth processes for materials like GaAs and SiC, controlling crystal structure quality through precise gas ratio adjustments to enhance device performance.
Research and small-batch production: Compatible with laboratory-scale process development, enabling rapid parameter switching via software to support verification testing of new materials and processes.

安装前准备：在安装0010-23716前，需确保工艺腔室已断电并泄压，使用洁净室级工具拆卸旧组件。清洁安装表面，检查 O 型圈密封性，避免颗粒残留。按照图纸正确连接气体管路（注意 VCR 接头扭矩为 15–20 N・m），并通过配套软件校准传感器零点。
维护建议：每生产 500 批次晶圆后，需对0010-23716进行预防性维护，包括清洗气体通道、更换磨损密封件、校验 MFC 精度。定期检查压力传感器响应时间（应≤50ms），并通过诊断工具更新固件至最新版本。对于高腐蚀性工艺，建议每季度进行材料表面分析，评估腐蚀程度。

Installation preparation: Before installing the 0010-23716, ensure the process chamber is powered off and depressurized. Use cleanroom-grade tools to remove the old component. Clean the installation surface, check O-ring seals, and avoid particle residue. Connect gas pipelines correctly according to the diagram (note VCR fitting torque: 15–20 N·m) and calibrate sensor zero points through the supporting software.
Maintenance suggestions: Perform preventive maintenance on the 0010-23716 after every 500 wafer batches, including cleaning gas channels, replacing worn seals, and verifying MFC accuracy. Regularly check pressure sensor response time (should be ≤50ms) and update firmware to the latest version via diagnostic tools. For highly corrosive processes, surface material analysis is recommended quarterly to assess corrosion levels.Whatsapp:+86 18059884797

我们公司为0010-23716提供为期一年的质量保修服务，覆盖非人为因素导致的硬件故障。在保修期内，若产品出现性能异常或功能失效，我们将提供更换服务。此外，对于停产型号或紧急需求，我们依托全球供应链网络，能够快速响应客户对稀缺备件的采购需求，以可靠的服务助力工业系统持续稳定运行。
 

Our company provides a one-year quality warranty for the 0010-23716, covering hardware failures caused by non-human factors. During the warranty period, if the product experiences performance anomalies or functional failures, we will provide replacement services. Additionally, for discontinued models or urgent needs, we rely on our global supply chain network to quickly respond to customers’ procurement demands for scarce spare parts, supporting the continuous and stable operation of industrial systems with reliable services.E-mail : xiongbagk@gmail.com
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