979B-01-0013  MKS HPS®系列979B大气真空(ATV)换能器

详情介绍:979B-01-0013  MKS HPS®系列979B大气真空(ATV)换能器

MKS HPS®系列979B大气真空(ATV)换能器是一种通用真空换能器，可提供从10-10托(特高压)到大气压的广泛测量范围。979B在单个外壳中结合了基于mems的MicroPirani™和小型化热阴极传感器，以简化仪表集成。979B可以通过数字通信(RS232或RS485)或作为自主模拟单元操作。德加和灯丝选择可以通过数字通信控制，从顶板按钮控制或模拟连接。需要电源和显示器的客户可以使用979B与本网站销售的PDR900系列控制器PN P102879。有关完整的规格和操作信息，请参阅下载部分。
所有用户访问都是通过15针的D-sub连接器和两个按钮开关。有关更多信息，请参阅RS-485命令集部分。
POWER LED指示何时向979B换能器供电。
灯丝ON LED指示电源何时应用到换能器灯丝。灯丝ON灯也可以与灯丝ON灯配合使用
测试RS485 – TST命令(在RS485命令集部分中描述)，以直观地识别哪个传感器被设置为特定地址。当几个HPS传感器连接到同一系统时，这是有用的。
下图显示了979B换能器的前视图
979B换能器设计用于测量真空室压力，作为用户设计系统过程的一部分。它结合了一个热阴极传感器来测量从5×10-10到3×10-3 Torr的压力和一个MicroPirani传感器来测量从1×10-3到ATM的压力。PR3组合绝对数字压力输出和模拟输出提供从5×10-10 Torr到ATM的单个组合读数。此外，两个传感器可以独立读取。随着模拟输出外部控制可用于灯丝选择德加所以换能器(通常设定点值，校准值等。已进入)能否独立操作
测量高真空压力。
♦控制系统压力使用数字通信或模拟输出作为输入到一个自动压力控制器。
♦测量由机械真空泵产生的前线和粗线压力。
控制阀和泵使用继电器设定点自动泵降。
♦检测异常压力并使用继电器设定点采取适当的安全措施。
♦用继电器设定点启动或停止系统进程。
♦测量回填气体压力。

979B-01-0013

The MKS HPS® Series 979B Atmosphere to Vacuum (ATV) transducer is a general purpose vacuum transducer that provides a wide measurement range, from 10-10 torr (UHV) to atmospheric pressure. The 979B combines both the MEMS-based MicroPirani™ and a miniaturized hot cathode sensor in a single housing for simplified gauge integration. The 979B can be operated via digital communication (RS232 or RS485) or as an autonomous analog unit. Degas and filament select can be controlled via digital communication, push button control from the top panel or analog connections. Customers requiring both a power supply and display can use the 979B with the PDR900 Series Controller PN P102879 sold on this website. For Complete Specifications and Operation Information See the DOWNLOADS section.

All user access is through the 15-pin D-sub connector and the two push button switches. See the RS-485 Command Set section for more information.
The POWER LED indicates when power is applied to the 979B Transducer.
The FILAMENT ON LED indicates when power is applied to the transducer filament. The FILAMENT ON light can also be used in conjunction with the
Test RS485 – TST command (described in the RS485 Command Set section) to visually identify which sensor is set to a particular address. This is useful when several HPS transducers are connected to the same system.
The figure below shows the front view of the 979B Transducer

The 979B Transducer is designed to measure vacuum chamber pressures as part of a user’s designed system processes. It combines a Hot Cathode sensor to measure pressures from 5×10-10 to 3×10-3 Torr and a MicroPirani sensor to measure pressures from 1×10-3 to ATM. PR3 the combined absulute digital pressure output and the analog output provides a single combined reading from 5×10-10 Torr to ATM. In addition the two sensors can be read independently. Along with an analog output external controls are available for filament select degas so the transducer (often set point values, calibration values ect. have been entered) can operate independently

Measure high vacuum pressure.
♦ Control system pressure using digital communications or analog output as input to an automatic pressure controller.
♦ Measure foreline and roughing pressures generated by mechanical vacuum pumps.
♦ Control valves and pumps to automate pump-down using relay set points.
♦ Sense abnormal pressure and take appropriate security measures using relay set points.
♦ Start or stop system processes with relay set points.
♦ Measure pressures of backfilling gases.

热卖型号：979B-01-0013  MKS HPS®系列979B大气真空(ATV)换能器

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