APEX3013 3156114-746 3 kW 13.56 MHz射频发生器

Advanced Energy (AE) Apex®3k2PIN是一款3 kW 13.56 MHz射频发生器，其引脚二极管匹配网络能够在几个不同的阻抗区工作。这种多功能发电机以其电力输送一致性，高功率密度和卓越的可靠性而闻名。然而，由于只有两个引脚二极管，阻抗匹配网络被限制在四个引脚位置。

为了扩大Apex的可用调谐范围，并为各种应用提供改进的过程控制，开发了一种转换套件，可以在现有的Apex 3k2PIN上添加额外的引脚二极管。通过转换为3k5PIN，相同的Apex单元现在能够在32个不同的引脚位置工作，覆盖比以前大得多的阻抗范围。

好处
与新的发电机/匹配器组合相比，成本有效的方法提高了性能
增加了阻抗匹配范围，以改进定制过程的调谐
从操作的角度来看，转换后的装置是透明的
灵活的转换套件，每个都有四个预编程引脚位置，允许自定义阻抗范围选择，同时保持与现有工具软件的兼容性
可选的图形用户界面提供现场选择引脚位置，以优化每个客户工艺位置的阻抗范围

此处显示的功率分布图说明了3k5PIN扩展后的阻抗范围。转换后的单元可以在整个频谱的更多阻抗点上提供全功率(3000 W)。

先进能源公司(AE)致力于为全球客户提供完善的电力服务已有三十多年的历史。AE为关键任务应用和流程设计和制造高度工程化的精密功率转换、测量和控制解决方案。AE的电源解决方案使客户能够在复杂的半导体和工业薄膜等离子体制造工艺，要求高和低电压应用以及温度临界热过程中进行创新。
凭借深厚的应用专业知识和全球响应式服务和支持，AE建立了合作伙伴关系，以满足快速的技术发展，推动客户增长，并为技术的未来提供动力

APEX3013 3156114-746

The Advanced Energy (AE) Apex® 3k2PIN is a 3 kW 13.56 MHz RF generator with a pin diode matching network capable of operating in a few different impedance zones. This versatile generator is known for its power delivery consistency, high power density, and exceptional reliability. However, with only two pin diodes, the impedance matching network is limited to four pin positions.

In order to expand the available tuning range of the Apex and provide improved process control for a wide variety of applications, a conversion kit was developed to add additional pin diodes to the existing Apex 3k2PIN. By converting to a 3k5PIN, the same Apex unit is now capable of operating in 32 different pin positions, covering a much larger impedance range than before.

BENEFITS
 Cost effective approach to enhancing performance compared to new generator/match combination
 Increased impedance matching range for improved tuning of custom processes
 Converted unit is transparent from an operational standpoint
 Flexible conversion kits, each with four pre-programmed pin positions, allow custom impedance range selection while maintaining compatibility with existing tool software
 Optional graphical user interface provides on-site selection of pin positions to optimize the impedance range to each customer process position

The power profile shown here illustrates the expanded impedance range available with the 3k5PIN. The converted unit can deliver full power (3000 W) at more impedance points across the spectrum.

Advanced Energy (AE) has devoted more than three decades to perfecting power for its global customers. AE designs and manufactures highly engineered, precision power conversion, measurement and control solutions for mission-critical applications and processes. AE’s power solutions enable customer innovation in complex semiconductor and industrial thin film plasma manufacturing processes, demanding high and low voltage applications, and temperature-critical thermal processes.
With deep applications know-how and responsive service and support across the globe, AE builds collaborative partnerships to meet rapid technological developments, propel growth for its customers and power the future of technology