E28B-23747 带蚀刻传感器的电容式压力计

MKS型E28D是符合rohs标准的蚀刻过程引起漂移的解决方案。基于行业标准的Baratron电容压力计，MKS开发了传感器结构，几乎消除了隔膜上工艺副产品的沉积，从而最大限度地减少了漂移。E28D型Baratron温度控制在100°C，精确到读数的0.25%，并包括更新的温度控制电子设备，以提供卓越的长期稳定性和可重复性。可选加热器和温度状态LED/开关指示加热器(保持传感器温度到100°C)在控制中。这款电容式压力计的满量程范围低至50 mTorr (0.07 mbar)，以适应当今较低的工艺压力。
基于已建立的Baratron电容压力计技术，传感器的湿表面是Inconel®，具有优异的耐腐蚀性气体性能。现代不锈钢包装提供了洁净室兼容的产品。该产品可与早期的128型，628B型和E28B型Baratron电容压力表互换，可与MKS电源，显示单元和压力控制器或用户兼容的电源/读出设备一起使用。

E28B-23747

The MKS Type E28D is the RoHS-compliant solution for etch process-induced drift. Based on the industry-standard Baratron capacitance manometer, MKS has developed structures in the sensor that nearly eliminate the deposition of process byproducts on the diaphragm, which minimizes drift. The Type E28D Baratron is temperature controlled to 100°C, accurate to 0.25% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 100°C) is in control. This capacitance manometer is available in Full Scale ranges down to 50 mTorr (0.07 mbar) to accommodate today’s lower process pressures.
Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier Type 128, 628B, and E28B Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user’s compatible power supply/readout devices.